Patent · US Expired

Method for producing a pressure sensor

US5776276A · kind A · utility

6Cited by

8References

6Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Ulrich Goebel · Hattersheim, DE
Andreas Thomae · Kirchentellinsfurt, DE
Juergen Schwaiger · Reutlingen, DE
Rolf Becker · Rheydt, DE
Andreas Fischer · Entringen, DE

Key dates

Filing date	Feb 12, 1996
Grant date	Jul 7, 1998
Priority date	—
Expiry date	Feb 12, 2016

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0044
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a method for producing a pressure sensor, a ceramic plate is joined to a shaped ceramic part. The shaped ceramic part has a depression. Around the depression there is provided a thick-layer paste which does not completely surround the depression. As a result, the air can escape from the depression during firing and a subatmospheric pressure can thus be enclosed in the depression.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.