Electronic coating materials using mixed polymers
US5776599A · kind A · utility
61Cited by
21References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1996 |
| Grant date | Jul 7, 1998 |
| Priority date | — |
| Expiry date | Dec 23, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/25
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a method of forming coatings on electronic substrates and the substrates coated thereby. The method comprises applying a coating comprising hydrogen silsesquioxane resin and a polysilazane on a substrate and heating the coated substrate at a temperature sufficient to convert the resins to ceramics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.