Interferometric measurement of absolute dimensions of cylindrical surfaces at grazing incidence
US5777738A · kind A · utility
6Cited by
11References
34Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 17, 1997 |
| Grant date | Jul 7, 1998 |
| Priority date | — |
| Expiry date | Mar 17, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02027
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Cylindrical surfaces of a test cylinder are measured with a grazing incidence interferometer. Separate measures of a test cylinder's cylindrical surface and a master cylinder's surface are made and compared to obtain absolute measures of the test cylinder's surface. Surface fitting techniques are used to discount the effects of positioning errors, and a separate measurement is used to resolve remaining ambiguities for extending the range of test cylinder sizes that can be measured with absolute dimensions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.