Patent · US Expired

Deformable mirror, in particular for a laser beam material machining apparatus

US5777807A · kind A · utility

16Cited by

9References

17Claims

0Family size

Assignee

Diehl GmbH & Co. · DE

Inventors

Klaus Bar · Achern, DE
Reinhard Schmiedl · Weißenburg, DE
Brigitte Freisleben · Wendelstein, DE

Key dates

Filing date	Jun 16, 1995
Grant date	Jul 7, 1998
Priority date	—
Expiry date	Jun 16, 2015

Classification

Technology area (CPC G)Physics
CPC primaryG02B7/1815
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A deformable mirror for a laser beam material machining apparatus including a housing for supporting a mirror plate, an electro-mechanical actuator disposed within a jacket tube, a pressure portion disposed at one end of the actuator and a rear end adaptor with a prestressing screw at the other end of the actuator for operatively acting on the mirror plate. The materials of the jacket tube and the housing as well as the materials of the pressure portion and the rear end adaptor are so selected on the basis of their linear coefficients of thermal expansion, such that a temperature change will cause essentially similar overall linear expansion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.