Liquid supplying apparatus
US5778911A · kind A · utility
14Cited by
17References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 4, 1995 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Oct 4, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/5762
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A liquid supplying apparatus for supplying treatment liquid to a treatment liquid ejecting unit which ejects treatment liquid to a work, which is capable of supplying high quality treatment liquid without wasting treatment liquid. Since a fixed quantity of treatment liquid is ejected from the treatment liquid ejecting unit during the process waiting time and this treatment liquid is ejected through a cup sealed airtight to a liquid tank and circulated, the liquid supplying apparatus capable of supplying high quality treatment liquid can be realized without wasting treatment liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.