Adjustable wafer cassette stand
US5779203A · kind A · utility
462Cited by
12References
29Claims
0Family size
Inventor
Key dates
| Filing date | Jun 28, 1996 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Jun 28, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/137
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention relates, generally to a wafer cassette holding mechanism for use in processing wafers. The cassette holding mechanism has adjustable alignment posts to facilitate the cassette placement, and an adjustment guide for guiding the placement of the cassette on the holding mechanism so that the holding mechanism may be configured to receive and securely hold a variety of different sizes and brands of wafer cassettes. In addition, the cassette holding mechanism further includes a plurality of adjustment screws for fine tuning the level position of the support platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.