Electromechanical transducer
US5780727A · kind A · utility
74Cited by
5References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 5, 1997 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Mar 5, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/863
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A field effect transistor and a piezoelectric sensor are positioned between layers of silicon and aluminum to function as a bimetallic electromechanical transducer. The transducer can be used in atomic force microscopy or as an actuator, a chemical sensor, or an oscillator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.