Non-volatile semiconductor memory device including memory transistor with a composite gate structure
US5780893A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1996 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Dec 19, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/28194
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A non-volatile semiconductor memory device including a memory cell having a memory transistor and a selection transistor, comprising: a composite gate structure of the memory transistor formed on a surface of a semiconductor substrate at its first region with a first insulating film interposed therebetween and including a laminate of a floating gate electrode, a second insulating film and a control gate electrode; a gate electrode of the selection transistor formed on the surface of the semiconductor substrate at its second region close to the first region with a third insulating film interposed therebetween; and an impurity diffusion layer formed in the semiconductor substrate at its region between the first and second regions and functioning as a drain of the memory transistor, common to a source of the selection transistor, the impurity diffusion layer having at least an extension region extending to a part of the semiconductor substrate disposed under the composite gate structure, the extension region having first, second and third layers wherein the first and second layers include first and second impurities at first and second different concentrations, respectively, and the t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.