Optical microshutter array
US5781331A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 24, 1997 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Jan 24, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical shutter apparatus includes a source of illumination and a first aperture plate positioned in a path of light from the source of illumination. A cantilever shutter is positioned at each aperture in the aperture plate and includes at least two bonded layers, one being an electrically resistive layer which exhibits a first thermal coefficient of expansion (TCE) and the second layer exhibiting a second TCE that is different from the first TCE. A proximal end of the bonded layers is attached to the aperture plate at each aperture and a distal portion thereof covers the respective aperture when in position thereover. A controller applies signals to the first electrically resistive layer to cause a heating of the first and second layers and a resultant unequal expansion thereof. The expansion causes a flexure of the cantilever shutter and moves the distal portion thereof to either cover or uncover the aperture, which, when uncovered, allows transmission of the illumination therethrough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.