Quartz lamp heater assembly for thin film deposition apparatus
US5781692A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 4, 1997 |
| Grant date | Jul 14, 1998 |
| Priority date | — |
| Expiry date | Jun 4, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/0038
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A heater assembly for a vapor deposition apparatus is able to achieve extended operating life in the Oxygen rich low pressure high temperature atmosphere even though employing commercially available quartz lamps to generate heat. Multiple quartz lamps (1) are individually held in a socket-less support (3). The rigid lamp terminals (22 & 24) are connected to respective lengths of flexible stranded wire (30 & 28) by an INCONEL crimp insert (32 & 34), forming cables through which the lamp is connected in electrical circuit and that effectively isolate the lamp terminals from the physical effects of relative thermal expansion between heater assembly elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.