Process for the micromechanical fabrication of nozzles for liquid jets
US5781994A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1995 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Nov 29, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A process for the micromechanical fabrication of nozzles for ink jets includes forming a groove on a surface of a first substrate, securing the first substrate to a second substrate to form an assembly in which the second substrate covers the groove to form a channel having walls, and then forming an internal protective coating within the channel by thermal oxidation of the walls of the channel. The first and second substrates are then cut along a plane extending perpendicular to the channel thereby to form a nozzle for dispensing a liquid jet. Scales, formed as a result of the cutting operations, are formed on the internal protective coating rather than directly on the walls of the channel. These scales then are removed from the nozzle by eliminating the internal protective coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.