Cryopump with improved shielding
US5782096A · kind A · utility
15Cited by
12References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1997 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Feb 5, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S417/901
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cryopump includes a two-stage refrigerator, a primary pumping surface, and a radiation shield. The radiation shield is in thermal contact with the first stage of the refrigerator. The primary pumping surface is surrounded by the radiation shield and is in thermal contact, through a direct conductive link, with the second stage of the refrigerator. The refrigerator, however, is external to the radiation shield.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.