Method of making antireflective coatings
US5783049A · kind A · utility
55Cited by
11References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1996 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Aug 16, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An improved way to impart antireflection properties to light transmissive substrates and, at the same time, achieve a durable surface and electrical conductivity is disclosed. A stack of at least two sputter-deposited light transmissive inorganic layers, one of which being electrically conductive and having a high index of refraction with the one above it (relative to the substrate being antireflected) having a low index of refraction, in combination with a thin lubricating overlayer comprising a solvent-soluble lubricant such as a solvent-soluble fluoropolymer can achieve this desired combination of properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.