Positive-working radiation-sensitive mixture

US5783354A · kind A · utility

Assignee

• BASF SE

Inventors

• Reinhold Schwalm · Monsheim, DE
• Dirk Funhoff · Heidelberg, DE
• Horst Binder · Lampertheim, DE

Key dates

• Filing date: Sep 9, 1996
• Grant date: Jul 21, 1998
• Expiry date: Sep 9, 2016

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S430/111
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A positive-working radiation-sensitive mixture essentially consists of PA1 (a.sub.1) at least one water-insoluble, organic polymeric binder which contains acid-labile groups and becomes soluble in aqueous alkaline solutions as a result of the action of acid, or PA1 (a.sub.2.1) a polymeric binder which is insoluble in water and soluble in aqueous alkaline solutions and PA1 (a.sub.2.2) a low molecular weight organic compound whose solubility and aqueous alkaline developer is increased as a result of the action of acid, and PA1 (b) at least one organic compound which produces an acid under the action of actinic radiation, and, if required, PA1 (c) one or more further organic compounds which differ from (b), PA1 at least one of the components (a.sub.1), (a.sub.2.1), (a.sub.2.2), (b) and (c) containing a bonded group of the general formula (I) --O.sup..crclbar. N.sup..sym. R.sub.4, or component (c) being of the formula (II) ##STR1## The radiation-sensitive mixture is suitable for the production of relief structures.