Diffuse surface interference position sensor
US5783752A · kind A · utility
14Cited by
10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 20, 1997 |
| Grant date | Jul 21, 1998 |
| Priority date | — |
| Expiry date | Feb 20, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/266
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Position of a diffusely scattering surface is detected by interfering backscattered light from respective input beams which illuminate a common spot. Through polarization of the input beams and appropriate filtering, backscattered light is isolated from specularly reflected light and interfered to form a fringe pattern on a detector. The position sensor has particular applicability as a push pin sensor in a hard disk servo system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.