Movable stage utilizing electromechanical transducer
US5786654A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1996 |
| Grant date | Jul 28, 1998 |
| Priority date | — |
| Expiry date | Jun 3, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N2/067
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A movable stage utilizing an electromechanical transducer. An actuator as a drive source thereof is composed of piezoelectric elements, drive member fixed thereto and a movable member friction-coupled with the drive member. When a drive pulse is applied to the piezoelectric element to cause it to show reciprocal displacements at different rates in the thickness direction, the movable member frictionally coupled with the drive member moves in the predetermined direction to move the movable table coupled with the movable member in the predetermined direction. The movable stage comprising the movable table moving in the two axes or three axes can be constituted by providing the actuator in the two axes or three axes crossing with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.