Method of separating electronic devices contained in a carrier

US5789307A · kind A · utility

Assignee

• Deutsche ITT Industries, GmbH · DE

Inventors

• Gunter Igel · Teningen, DE
• Martin Mall · Glückstadt, DE

Key dates

• Filing date: Feb 7, 1997
• Grant date: Aug 4, 1998
• Expiry date: Feb 7, 2017

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/78
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method of separating electronic devices contained in a carrier which are provided at the surface of the carrier and are covered by a protective layer. Openings are provided above separation regions between adjacent electronic devices. The material of the carrier is removed in the separation regions starting from the openings, and the electronic devices are, at least during the material-removing process, confined in the carrier by respective regions with a material removal property different from that of the carrier.