Electrostatically levitated conveyance apparatus and electrode thereof for electrostatic levitation
US5789843A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Oct 30, 1995 |
| Grant date | Aug 4, 1998 |
| Priority date | — |
| Expiry date | Oct 30, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N13/00
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An electrostatic levitating electrode (10) is split into four equal segments on a circular insulating substrate (4) with isolating strips (11a, 11b) interposed between them. A positive voltage and a negative voltage are alternately applied to these four electrodes (10a, 10b, 10c, 10d), which are sector-shaped. In order to prevent the concentration of electric charge in such case, the corner portions of the sector-shaped electrodes (10a, 10b, 10c, 10d) are formed to have roundness (13). Furthermore, a lead wire (12a) is connected to the outer side of the sector-shaped electrode (10a), a lead wire (12b) is connected to the outer side of the sector-shaped electrode (10b), a lead wire (12c) is connected to the outer side of sector-shaped electrode (10c), and a lead wire (12d) is connected to the outer side of sector-shaped electrode (10d). Accordingly, the maximum attraction force and levitational rigidity are increased without damage to electrodes at lead portions and it possible to convey a levitated body with accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.