Method of fabricating a color image sensor from a gray scale image sensor
US5792374A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 1996 |
| Grant date | Aug 11, 1998 |
| Priority date | — |
| Expiry date | May 15, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/182
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method of fabricating a color image sensor includes the steps of: (a) providing a gray scale image sensor with an array of photoelectric converting cells and a plurality of bonding pads on a substrate; (b) applying a first transparent layer on surface of the gray scale image sensor; (c) successively forming first, second and third color filter patterns on the first transparent layer, the first color filter pattern being disposed directly above a first group of the photoelectric converting cells, the second color filter pattern being disposed directly above a second group of the photoelectric converting cells, the third color filter pattern being disposed directly above a third group of the photoelectric converting cells; (d) coating a second transparent layer on the color filter patterns and on portions of the first transparent layer not covered by the color filter patterns; (e) depositing a metal layer on the second transparent layer; (f) patterning and etching the metal layer so as to remove portions of the metal layer, the second transparent layer and the first transparent layer which are directly above the bonding pads to expose the bonding pads; and (g) removing remaining po…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.