Interferometer with compound optics for measuring cylindrical objects at oblique incidence
US5793488A · kind A · utility
11Cited by
15References
66Claims
0Family size
Assignee
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Key dates
| Filing date | Jul 31, 1995 |
| Grant date | Aug 11, 1998 |
| Priority date | — |
| Expiry date | Jul 31, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Compound diffractive optics are used in an interferometer for simultaneously measuring multiple surfaces, making multiple measurements of individual surfaces, conveying test beams multiple times, and aligning pairs of the diffractive optics with each other. Typically, the compound optics have multiple diffraction zones that reshape test beams for reflecting from test surfaces or for combining with reference beams. The multiple diffraction zones can also exhibit different optical qualities such as transmission and reflection for conveying the test beams to and from the test surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.