Zero dead-leg valve structure
US5794659A · kind A · utility
4Cited by
34References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Dec 31, 1996 |
| Grant date | Aug 18, 1998 |
| Priority date | — |
| Expiry date | Dec 31, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87893
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve structure without dead-legs is provided for controlling the flow of gases in a semiconductor fabrication facility. The valve structure comprises a conduit forming a loop with three ports. Flexible metallic diaphragms are selectively operable to open and close two of the ports.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.