Chuck assembly
US5794948A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1996 |
| Grant date | Aug 18, 1998 |
| Priority date | — |
| Expiry date | Nov 12, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/1066
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A chuck assembly defining a longitudinal axis for internally holding a hollow substrate is disclosed including: (a) a stationary top pressing member; (b) a bottom pressing member movable along the longitudinal axis; (c) an elastic bag defining an opening, a top region, a side wall, and a bottom region, wherein the bag is stretchable along the longitudinal axis and a portion of the top region adjacent the side wall is immobilized against the stationary top pressing member during the stretching of the bag and a portion of the bottom region is coupled to the bottom pressing member; and (d) a width changing apparatus movable along the longitudinal axis, wherein the width changing apparatus is operatively coupled to the bottom pressing member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.