Patent · US Expired

Chuck assembly

US5794948A · kind A · utility

14Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 12, 1996
Grant dateAug 18, 1998
Priority date
Expiry dateNov 12, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T279/1066
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A chuck assembly defining a longitudinal axis for internally holding a hollow substrate is disclosed including: (a) a stationary top pressing member; (b) a bottom pressing member movable along the longitudinal axis; (c) an elastic bag defining an opening, a top region, a side wall, and a bottom region, wherein the bag is stretchable along the longitudinal axis and a portion of the top region adjacent the side wall is immobilized against the stationary top pressing member during the stretching of the bag and a portion of the bottom region is coupled to the bottom pressing member; and (d) a width changing apparatus movable along the longitudinal axis, wherein the width changing apparatus is operatively coupled to the bottom pressing member.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.