Patent · US Expired

Optical apparatus for the homogenization of laser radiation and the generation of several lighting fields

US5796521A · kind A · utility

34Cited by

4References

6Claims

0Family size

Assignee

Microlas Lasersystem GmbH · DE

Inventors

Hans-Jurgen Kahlert · Göttingen, DE
Berthold Burghardt · Oettingen, DE

Key dates

Filing date	Jul 17, 1997
Grant date	Aug 18, 1998
Priority date	—
Expiry date	Jul 17, 2017

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/123
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.