Torque magnetometer utilizing integrated piezoresistive levers
US5798641A · kind A · utility
90Cited by
3References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 17, 1997 |
| Grant date | Aug 25, 1998 |
| Priority date | — |
| Expiry date | Mar 17, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/1215
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A torque magnetometer employing integrated piezoresistive levers to measure magnetization of very small anisotropic samples. A sample holding platform is cantilevered from the substrate by parallel legs on which piezoresistors have been applied. A Wheatstone bridge, which includes the piezoresistors, is completely integrated on a magnetometer substrate. Specific output connections are made to the electrical conductors of the bridge in a manner to eliminate Hall effect error signals in an alternative embodiment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.