Patent · US Expired

Laser drawing apparatus featuring a beam separator supported by an adjusting means swingable about a rotating shaft

US5798784A · kind A · utility

16Cited by
2References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 17, 1996
Grant dateAug 25, 1998
Priority date
Expiry dateJun 17, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/704
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A laser drawing apparatus is provided including, a first beam splitting element for splitting laser light emitted from a laser source into a plurality of beams, a second beam splitting element for splitting the beams split by the first beam splitting element into a plurality of groups of drawing beams, optical modulators which provide separate ON/OFF drawing data to the respective split drawing beams split by the second splitting element, a beam combining element for combining the split drawing beams to which the ON/OFF drawing data has been provided, and a beam scanning element for scanning a drawing surface on which an image is to be formed with the combined drawing beams.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.