Laser drawing apparatus featuring a beam separator supported by an adjusting means swingable about a rotating shaft
US5798784A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 1996 |
| Grant date | Aug 25, 1998 |
| Priority date | — |
| Expiry date | Jun 17, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/704
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A laser drawing apparatus is provided including, a first beam splitting element for splitting laser light emitted from a laser source into a plurality of beams, a second beam splitting element for splitting the beams split by the first beam splitting element into a plurality of groups of drawing beams, optical modulators which provide separate ON/OFF drawing data to the respective split drawing beams split by the second splitting element, a beam combining element for combining the split drawing beams to which the ON/OFF drawing data has been provided, and a beam scanning element for scanning a drawing surface on which an image is to be formed with the combined drawing beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.