Optical displacement sensor
US5798826A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1997 |
| Grant date | Aug 25, 1998 |
| Priority date | — |
| Expiry date | Mar 20, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A optical displacement sensor comprises optical output detecting unit for detecting an optical output from the semiconductor laser, which changes in accordance with the phase of return light reflected by the external reflection unit, when an optical distance between the semiconductor laser and the external reflection unit changes at a change rate, optical distance modulation unit for changing the optical distance at predetermined periods by an amount of modulation of the optical distance at a rate higher than the change rate, and a detection circuit system for detecting the amount and direction of change of the optical distance based on an optical output from the optical output detecting unit detected in synchronism with a timing of modulating the optical distance by the optical distance modulation unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.