Micro-fabricated device with integrated electrostatic actuator
US5801472A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1996 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | Aug 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device according to the present invention is a miniaturized efficient device wherein electromechanical transduction is enabled and which is provided with at least an integrated electrostatic actuator provide with an actuator in which a fixed portion and a movable portion are opposite, a plurality of which are arranged and the relative amount of movement of which is controlled by controlling electrostatic force operating between both, the movable portion moved by the integrated electrostatic actuator and a portion connected to the movable portion which can be operated mechanically. The probe of a scanning probe microscope is provided to the movable portion of the above actuator. The above transducer is provided with the structure in which a large number of such actuators are arranged two- or one-dimensionally.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.