Precision positioning control apparatus and precision positioning control method
US5801939A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 1, 1996 |
| Grant date | Sep 1, 1998 |
| Priority date | — |
| Expiry date | Mar 1, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/42225
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A precision positioning control apparatus includes a coarse positioner, a fine positioner, a displacement totalizer for totaling the displacements of the two positioners, a total displacement detector for producing a total displacement signal, a comparator for producing an error signal, a coarse positioner adjuster for adjusting the error signal and inputting the adjusted signal to the coarse positioner, and fine positioner adjuster for adjusting the error signal and inputting the adjusted signal to the fine positioner. The coarse position adjuster includes a gain element, a transfer element, a limitter, an integrator, a gain adjuster and an adder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.