Multizone bake/chill thermal cycling module
US5802856A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 1997 |
| Grant date | Sep 8, 1998 |
| Priority date | — |
| Expiry date | Jul 31, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A thermal cycling module includes an array of thermoelectric devices 36! divided into multiple zones A, B, C, D! independently controlled by corresponding variable power supplies 56, 58, 60, 62!. The thermoelectric devices 36! provide localized, precise, and rapid control of both heating and cooling, while fluid from one of several fluid supplies 64, 66, 68! provides bulk heating or cooling via a fluid heat exchanger 38!. Sensors 46, 48, 50, 52! provide feedback of temperature or other process parameters to a controller 54! which generates control signals for controlling the power supplies 56, 58, 60, 62!, the fluid supplies 64, 66, 68!, and fluid valves 70, 72! which control fluid flow through the heat exchanger 38!.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.