Patent · US Expired

Laser drawing apparatus and method for adjusting the same

US5805198A · kind A · utility

1Cited by
2References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 22, 1994
Grant dateSep 8, 1998
Priority date
Expiry dateJul 22, 2014

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/704
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A laser drawing apparatus is provided including a splitting means for splitting laser light emitted from a laser source into at least two groups of drawing beams, the beams of each group being aligned in a common plane; a scanning means for scanning a drawing surface with said at least two groups of drawing beams in a main scanning direction; a first adjusting means for rotating the common plane, in which one of the at least two bundles of drawing beams are aligned, about an axis extending parallel to the drawing beams; a second adjusting means for moving at least one of the at least two groups of drawing beams in said main scanning direction of the scanning means; and, a third adjusting means for moving at least one of the at least two groups of drawing beams in a sub-scanning direction perpendicular to the main scanning direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.