Patent · US Expired

Silica glass member with glassy carbon coating method for producing the same

US5807416A · kind A · utility

8Cited by

8References

7Claims

0Family size

Assignee

HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

Katsuhiko Kemmochi · Camas, US
Dietmar Hellmann · Gelnhausen, DE
Christian Gebauer · Hanau, DE

Key dates

Filing date	Sep 16, 1996
Grant date	Sep 15, 1998
Priority date	—
Expiry date	Sep 16, 2016

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC03C2217/282
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A silica glass member shows a glassy carbon coating wherein a surface of a silica glass substrate of the silica glass member shows a mean surface roughness (R.sub.a) in a range of 0.03 .mu.m to 2 .mu.m and it is coated with a glassy carbon coating. The member is manufactured by chemically roughening the substrate to a surface roughness in the above recited range; coating the surface of the silica glass substrate with an organic raw material containing carbon, curing and thereafter carbonizing the film of the organic raw material by forming a glassy carbon coating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.