Patent · US Expired

Apparatus for coating substrates in a vacuum

US5807470A · kind A · utility

21Cited by

10References

6Claims

0Family size

Assignee

Balzers und Leybold Duetschland Holding AG · DE

Inventors

Joachim Szczyrbowski · Goldbach, DE
Gotz Teschner · Hanau, DE

Key dates

Filing date	Aug 1, 1996
Grant date	Sep 15, 1998
Priority date	—
Expiry date	Aug 1, 2016

Classification

Technology area (CPC H)Electricity
CPC primaryH05H1/46
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An alternating-current source (2) is connected to two cathodes (6,7) which cooperate electrically with targets which are sputtered in a gas discharge while a process gas is introduced in a vacuum chamber (15). A network formed of a transformer (3) and additional coils (5, 12, 13) and condensers (4, 8, 9, 10, 11) acts as a filter to assure a stable coating process.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.