Fine positioning apparatus with atomic resolution
US5808302A · kind A · utility
13Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 1997 |
| Grant date | Sep 15, 1998 |
| Priority date | — |
| Expiry date | Feb 26, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A fine-positioning apparatus for a scanning probe microscope includes magnetic solenoid actuators for each of the x, y and z scanning axes of the microscope. The sample is mounted on the coil of one of the actuators for movement of the sample in the z direction while the tunnelling probe is attached to two other solenoid actuators for movement of the probe in the x and y directions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.