Method for detecting displacement of atoms on material surface and method for local supply of heteroatoms
US5808311A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1995 |
| Grant date | Sep 15, 1998 |
| Priority date | — |
| Expiry date | Jun 16, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/857
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Atomic displacement on a material surface is detected by, in a system comprising the tip of a scanning tunneling microscope (STM) and a material in question, upon an atomic displacement operation comprising extraction of atoms on the material surface and adsorption of atoms onto the material surface through application of a pulse voltage to the tip of STM, measuring a z-piezo voltage along the time series during and after application of the pulse voltage. Furthermore, heteroatoms dissociated by a reaction between the tip surface of STM and heteromolecules in a heteromolecular atmosphere are stored on the surface of the tip of STM, and then, heteroatoms are locally adsorbed onto the material surface by causing electro-evaporation of the heteroatoms through application of a prescribed scanning voltage to the tip of STM.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.