Micropositioning device for disk head testing system
US5808435A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 28, 1996 |
| Grant date | Sep 15, 1998 |
| Priority date | — |
| Expiry date | May 28, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/42209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micropositioner has a coarse positioner and a fine positioner, with a separate closed loop control circuit for the fine positioner. A disk head being positioned over a disk is attached to the stage of the fine positioner. The fine positioner includes a parallelogram flexure having first and second opposite sides attached respectively to the coarse positioning stage and the fine positioning stage. A piezoelectric translator translates the second side of the flexure relative to the coarse positioning stage. In order to sense displacement of the fine positioning stage relative to the coarse positioning stage, a differential electric field sensor is employed. The sensor includes a pair of side plates both mounted fixedly relative to one of the stages and opposing each other to create an electrical field between them, and a probe plate mounted fixedly relative to the other of the two stages and between the two side plates. As the second stage moves relative to the first, the voltage sensed by the probe plate is fed back to control the piezoelectric translator until the probe voltage indicates that the fine displacement amount matches a desired fine displacement amount indicated by a c…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.