Semiconductor probe card for low current measurements
US5808475A · kind A · utility
16Cited by
9References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1996 |
| Grant date | Sep 15, 1998 |
| Priority date | — |
| Expiry date | Jun 7, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor probe card is provided with low dielectric absorption feed-through contacts to isolate test lines from printed circuit board leakage effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.