Interferometer having combined beam splitter compensator plate
US5808739A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 1997 |
| Grant date | Sep 15, 1998 |
| Priority date | — |
| Expiry date | Mar 28, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/453
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Michelson-type interferometer which includes apparatus for producing a suitable collimated interferometer input beam; a beam splitter and recombiner for first splitting the input beam into two beams which have components arranged to travel along parallel forward paths and then to recombine them into a single output beam as they are returned along reverse paths to the beam splitter and recombiner; an OPD scanner for scanning the optical path difference between the two split beams travelling along said paths while substantially maintaining the parallelism between the components, and a beam reverser common to the parallel beam components for reversing their direction of travel along the reverse paths and returning them for recombination into the single output beam at the beam splitter and recombiner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.