Method of reducing metallic impurities in ozone gas piping
US5810978A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 27, 1996 |
| Grant date | Sep 22, 1998 |
| Priority date | — |
| Expiry date | Nov 27, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B13/10
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of reducing metallic impurities in an ozone gas piping means, which entails producing ozone gas in an ozone-generating means and piping the produced ozone gas to stainless steel piping means, wherein the ozone gas is produced from a raw material oxygen gas containing at least one additional gas selected from the group consisting of nitrogen, helium, carbon dioxide, carbon monoxide and ozone; the additional gas being used in an amount of 0.025% by volume or more in total, with the proviso that nitrogen is not used as or in said additional gas in an amount of more than 1.0% by volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.