Pressure sensor package and method of making the same
US5811684A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Oct 10, 1996 |
| Grant date | Sep 22, 1998 |
| Priority date | — |
| Expiry date | Oct 10, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49927
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of securing a pressure sensor diaphragm to a pressure sensor base, including the steps of positioning the pressure sensor diaphragm over the pressure sensor base, placing a pressure sensor cap over the pressure sensor diaphragm, applying a tensile force to at least a portion of the cap, and deforming a portion of the cap around a portion of the base. The applying step can occur before the deforming step by engaging a portion of the cap and advancing the base toward the cap to create tension in a portion of the cap. This creates a tensile preload in the cap. The applying step can instead be performed during the deforming step by engaging a first portion of the cap and advancing a second portion of the cap toward the first portion of the cap and around a portion of the base. This can create tension in a portion of the cap when the deformation operation is being performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.