Capacitor
US5812364A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 15, 1997 |
| Grant date | Sep 22, 1998 |
| Priority date | — |
| Expiry date | Jan 15, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/66
Abstract
An MIM capacitor includes a lower electrode; a first insulating film disposed on the lower electrode; a second insulating film disposed on the first insulating film and having a first opening exposing a portion of the surface of the first insulating film on the lower electrode, the first opening having a perimeter; a third insulating film disposed on the second insulating film and having a second opening exposing a portion of the surface of the second insulating film, the second opening having a perimeter that surrounds the perimeter of the first opening on the second insulating film; and an upper electrode disposed on the first insulating film through the first opening and extending onto the second insulating film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.