Arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms
US5814116A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 13, 1996 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Jun 13, 2016 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F3/167
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An arrangement for generating a purified, low-turbulence air flow for supplying local clean rooms is aimed to reduce the constructional depth of an air processing installation and, in addition, to extensively prevent the transmission of vibrations from the air flow-generator to the equipment unit to be supplied. The wall of the plenum chamber located opposite an outlet opening in the plenum chamber adjoins a filter accommodated in a plenum chamber at the side for the inlet of unpurified air. A space remains open between the wall and the filter. This space communicates with the rest of the space in the plenum chamber and serves primarily to form the plenum. The arrangement is applicable in the manufacturing of integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.