Method of manufacturing multilayered ceramic substrate
US5814366A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jul 17, 1996 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Jul 17, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2201/09763
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In a method of manufacturing a multilayered ceramic substrate, a capacitor layer is formed on a green sheet of a low temperature co-firable ceramic by means of printing. The green sheet with the capacitor layer and a plurality of other green sheets are laminated together into a substrate laminate. Two release green sheets of alumina system each unsintered below 1,000.degree. C. are further laminated to the top and the bottom of the substrate laminate respectively. The obtained laminate is fired at a temperature ranging between 800.degree. and 1,000.degree. C. under pressure ranging between 2 and 20 kgf/cm.sup.2. The release green sheets adherent to the side surfaces of the substrate are removed after the firing. Subsequently, a wiring pattern is printed on the substrate, which is then fired at a temperature ranging between 800.degree. and 1,000.degree. C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.