Intergrated circuit with coaxial isolation and method
US5814889A · kind A · utility
249Cited by
47References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 5, 1995 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Jun 5, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/3025
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A die 810 has an outer, annular via 814 filled with conductive material in order to electrically shield an inner via 816. A die 820 can be electrically shielded from another area 822 by use of a wall 823 having a trench with oxidized side walls and a conductive filling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.