Patent · US Expired

Static random access memory having transistor elements formed on side walls of a trench in a semiconductor substrate

US5814895A · kind A · utility

80Cited by
6References
11Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 19, 1996
Grant dateSep 29, 1998
Priority date
Expiry dateDec 19, 2016

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S257/904

Abstract

In a static random access memory (SRAM), a memory cell ratio is increased without deteriorating an integration degree of this SRAM. The static random access memory is arranged by: trenches formed in a semiconductor substrate and an insulating layer for isolating elements within a memory cell forming region; one pair of word transistors; one pair of driver transistors for constituting a flip-flop by forming channel regions of the driver transistors in side surfaces of the trenches and by cross-connecting gate electrodes thereof and drain electrodes thereof at one pair of input/output terminals of the flip-flop; and one pair of word transistors connected between the one pair of input/output terminals of the flip-flop and a bit line.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.