Method and system for triangulation-based, 3-D imaging utilizing an angled scanning beam of radiant energy
US5815275A · kind A · utility
57Cited by
8References
52Claims
0Family size
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Key dates
| Filing date | Mar 27, 1997 |
| Grant date | Sep 29, 1998 |
| Priority date | — |
| Expiry date | Mar 27, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system for three-dimensional imaging of objects, including integrated circuit interconnections and many other microelectronic assemblies and miniature parts, is used to greatly improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45.degree., diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system having symmetry about the orthogonal axes of motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.