Patent · US Expired

Piezoelectrically actuated fluid pumps

US5816780A · kind A · utility

28Cited by
2References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 15, 1997
Grant dateOct 6, 1998
Priority date
Expiry dateApr 15, 2017

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF04B43/14
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A piezoelectrically actuated fluid pump including a pump housing, a pump chamber, inlet and outlet ports for communicating the pump chamber with the exterior of the pump housing, valves for opening and closing the ports, two prestressed piezoelectric diaphragm members which are self-actuated, and a power source is provided. The diaphragm members include a prestressed piezoelectric element which is durable, inexpensive and lightweight as compared with prior diaphragm pumps of comparable discharge capacity, and is actuated via electrical signals from an outside power source. No exterior mechanical parts for driving the diaphragm members are necessary. A modification is disclosed in which a central computer independently controls the phase angle of oscillation of the two diaphragm members, providing precise flow rate control.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.