Method for manufacturing organic electroluminescent element and apparatus therefor
US5817366A · kind A · utility
99Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 1996 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Jul 29, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/631
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a process and apparatus for manufacturing organic electroluminescence cell, wherein the steps after formation of a transparent electrode on a substrate plate up to formation of a protective film are successively carried out in vacuum chambers which are isolated from the oxidative external atmosphere and thereafter withdrawn from the chambers into the air. A plurarity of layer portions of at least a portion of the electroluminescence cell is formed in a plurality of woriking chambers and withdrawn to the outside after formation of a protective film thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.