Patent · US Expired

Pressure sensors

US5817943A · kind A · utility

42Cited by
14References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 24, 1997
Grant dateOct 6, 1998
Priority date
Expiry dateMar 24, 2017

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01L11/008
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A pressure sensor having structure for generating a magnetic force to balance forces on opposing sides of a flexible diaphragm centered within a pressure chamber allows fluid pressure to be introduced into the chamber on one side of the diaphragm. A first magnetic coil is positioned on another side of the diaphragm and a second coil is mounted to the diaphragm. When fluid pressure is introduced into the pressure chamber, the diaphragm deflects, and the magnitude of current required to generate a recentering magnetic force which causes the diaphragm to be recentered constitutes a measure of the fluid pressure. Since the recentering magnetic force is substantially unaffected by temperature, the fluid pressure measurement obtained is substantially independent of temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.