Rotatable micromachined device for sensing magnetic fields
US5818227A · kind A · utility
47Cited by
3References
21Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 22, 1996 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Feb 22, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49076
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined magnetometer is built from a rotatable micromachined structure on which is deposited a ferromagnetic material magnetized along an axis parallel to the substrate. A structure rotatable about the Z-axis can be used to detect external magnetic fields along the X-axis or the Y-axis, depending on the orientation of the magnetic moment of the ferromagnetic material. A structure rotatable about the X-axis or the Y-axis can be used to detect external magnetic fields along the Z-axis. By combining two or three of these structures, a dual-axis or three-axis magnetometer is obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.