Miniaturized fabry-perot spectrometer for optical analysis
US5818586A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Oct 31, 1995 |
| Grant date | Oct 6, 1998 |
| Priority date | — |
| Expiry date | Oct 31, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/0314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A miniaturized spectrometer for gas concentration measurement includes a radiation source for admitting electromagnetic radiation onto the gas to be measured, a detector for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, control electronics circuitry for controlling the radiation source, the interferometer and the detector. The radiation source, the detector, the interferometer and the control electronics are integrated in a miniaturized fashion onto a common, planar substrate and the radiation source is an electrically modulatable micromechanically manufactured thermal radiation emitter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.